Welcome to JENT its Thursday 18th of January 2018

Journal of Environmental Nanotechnology

(A Quarterly Peer-reviewed and Refereed International Journal)
ISSN(Print):2279-07 48; ISSN(Online):2319-5541
CODEN:JENOE2

Fabrication and Performance of a Surface Acoustic Wave Resonator Based Chemical Sensor

Abstract

The fabrication and performance of a SAW resonator based chemical sensor designed at center frequency of 500 MHz is described for detection of Sarin (DMMP). The resonator and reflector grating element width (critical dimension) was 1.69 micron. The mask was fabricated and subsequently, the SAW resonator was fabricated on ST-Quartz substrate. The performance of resonator demonstrated resonance at 505.7 MHz (insertion loss within 6 dB). The sensing curve of the prepared SAW sensor with exposure to 3 ppm DMMP vapours showed a frequency shift of 700 Hz (233 Hz/ppm).

Article Type: Research Article

Corresponding Author: M. U. Sharma 5  

Email: musharma@sspl.drdo.in

This article has not yet been cited.

A. B. Dhaulakhandi 1,  S. K. Koul 2,  U. Mittal 3,  A. T. Nimal 4,  M. U. Sharma 5*,  Dinesh Kumar 6.  

1. Micro Electronic Devices and Computational Systems, DRDO HQ, New Delhi, India.

2, 3, 4, 5. Solid State Physics Laboratory, Delhi, India.

6. Department of Electronics Sciences, Kurukshetra University, Haryana, India.

J. Environ. Nanotechnol. Volume 4, No.3 pp. 12-16
ISSN: 2279-0748 eISSN: 2319-5541
ENT153157.pdf
Download Citation

Reference

Afzal, A., Iqbal, N., Mujahid, A. and Schirhagl, R., Advanced vapor recognition materials for selective and fast responsive surface acoustic wave sensors: A review, Analytica. Chimica., Acta, 787(13), 36-49(2013).

Avramov, I. D., Rapp, M., Voigt, A., Stahl, U. and Dirschka, M., Comparative studies on polymer coated SAW and STW resonators for chemical gas sensor applications. Proc. IEEE/EIA International Frequency Control Symposium and Exhibition, IEEE, 250(17), 58-65(2000).

Dickert, F. L., Forth, P., Bulst, W. E., Fischeranuer, G. and Knauer, U., SAW device sensitivity enhancement in going from 80 MHz to 1 GHz, Sensors and Actuators, 46(12), 120-125(1998).

Fischerauer, G., Dickert, F., Forth, P. and Knauer, U., Chemical sensors based on SAW resonators working at up to 1 GHz., In Proc. Ultrasonics Symposium, IEEE, 27(13), 439-442(1996).

Islam, T., Mittal, U., Nimal, A. T. and Sharma, M. U., High Frequency Surface Acoustic Wave (SAW) Device for Toxic Vapor Detection: Prospects and Challenges, Sensing Technology: Current Status and Future Trends II, Smart Sensors, Measurement and Instrumentation 8, Springer International Publishing Switzerland, 17(27), 217-241(2014).

James, D., Scott, S. M., Ali, Z. and O'Hare, W., Chemical sensors for electronic nose systems, Microchemica. Acta, 149(1), 1-17(2005).

Joo, B. S., Huh, J. S. and Lee, D. D., Fabrication of polymer SAW sensor array to classify chemical warfare agents, Sensors and Actuators, 121(1), 47-53(2007).

Li, K., Du, X. S., Hu, J. and Sun, P., Optimization of the SAW gas sensor with two port resonator. In proceedings of International Conference on Apperrceiving Computing and Intelligence Analysis, IEEE, 202(2), 175-178(2009).

Liu, J., Wang, W., Li, S., Liu, M. and He, S., Advances in SAW gas sensors based on the condensate adsorption effect, Sensors, 11(12), 11871-11884(2011).

Liu, J. and Lu, Y., Response mechanism for surface acoustic wave gas sensors based on surface adsorption, Sensors, 14(5), 6844-6853(2014).

Maria, I. R. G., Carmen, M. I., Angel, M. B., and Antonio, A. V., Surface generated acoustic wave biosensors for the detection of pathogens: A Review, Sensors, 9(3), 5740-5769(2009).

Nimal, A. T., Singh, M., Mittal, U. and Yadava, R. D. S., A comparative analysis of one-port Colpitt and ptwo-Port Pierce SAW oscillators for DMMP vapoursensing, Sensors and Actuators, 114(1), 316-325(2006).

Nimal, A. T., Mittal, U., Singh, M., Yadava, R. D. S., Khaneja, M., Kannan, G. K., Kapoor, J. C., Dubey, V., Lal, G. and Vyas, K. D., Development of handheld SAW vapor sensors for Explosives and CW agents, Sensors and Actuators, 135(2), 399-410(2009).

Singh, H., Raj, V. B., Kumar, J., Mittal, U., Mishra, M., Nimal, A. T., Sharma, M. U. and Gupta, V., Metal oxide SAW E-nose employing PCA and ANN for the identification of binary mixture of DMMP and methanol, Sensors and Actuators, 200(23), 147-156(2014).

Wang, W., He, S., Li, S. and Pan, Y., High frequency stability oscillator for surface acoustic wave-based gas sensor, Smart Mater. Struct., 15(6), 1525-1542(2006).

doi:10.1088/0964-1726/15/6/003

Wen, W., Shitang, He., Shunzhou, L, Minghua, L. and Yong, P., Enhanced sensitivity of SAW gas sensor coated molecularly imprinted polymer incorporating high frequency stability oscillator, Sensorsand Actuators, 125(2), 422-427(2007).

Wohltjen, H., Mechanism of operation and design considerations for surface acoustic wave device vapour sensors, Sensors and Actuators, 5(7), 307-325(1984).

Yadong, J., Hu, J., Du, X., Xie, G. and Sun, P., SAW sensors for nerve agents detection, Proc. Symposium on photonics and optoelectronics, IEEE, 222(7), 1-4(2009).

doi:10.1109/SOPO.2009.5230274

>>